📮 MEMS Applications in Electronics by Aviru Kumar Basu (.PDF)

MEMS Applications in Electronics and Engineering is a state-of-the-art resource for scientists and students in sensor/ device research. It provides a thorough overview of the latest applications and devices in nano-scale sensors and their role in diagnostics, consumer electronics, automotive, energy harvesting, and IoT-based applications. It highlights recent developments in MEMS-based sensors and explains the fundamentals, novel processes, and materials of this global area of focus. The advent of microelectromechanical systems, commonly abbreviated as MEMS, has brought in the advantages of interfacing mechanical components with electronic circuits to realize a complete overall system. The three-dimensional (3D) nature of such mechanical components allows efficient implementation of MEMS devices towards sensing and communication by tapping on to the ability of MEMS devices being displaced under external stimuli. Such a motion of MEMS devices can be detected both electrically and optically. MEMS Applications in Electronics and Engineering is a valuable guide for students, researchers, and faculty engaged in MEMS-related research and research professionals.

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